论文信息 - Self-Aligned Formation of the Trench Bottom Shielding Region in 4H-SiC UMOSFETs - 字舞流文

Self-Aligned Formation of the Trench Bottom Shielding Region in 4H-SiC UMOSFETs

Keiko Ariyoshi | Shinsuke Harada | Hajime Okumura | Manabu Takei | Mitsuru Sometani | Yasunori Tanaka | Junji Senzaki | Y. Kobayashi | Takahito Kojima