论文信息 - Monolithic integration of vertical-cavity laser diodes and resonant photodetectors with hybrid Si3N4-SiO2 top Bragg mirrors

Monolithic integration of vertical-cavity laser diodes and resonant photodetectors with hybrid Si3N4-SiO2 top Bragg mirrors

Top-emitting vertical-cavity surface-emitting lasers are monolithically integrated with resonance enhanced photodetectors (REPDs), utilizing dielectric Si/sub 3/N/sub 4/-SiO/sub 2/ top Bragg mirrors. High-efficiency (66%) REPDs with a narrow optical bandwidth of 1.25 nm were realized by adjusting the incoupling mirror's reflectivity. High-finesse REPDs with low QW-absorption, have smaller efficiencies (/spl sim/10%), but extremely narrow optical bandwidths down to 0.196 nm. The high spectral resolution of these detectors leads to the appearance of higher-order transverse detector modes in the spectral response.

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