Hysteresis, Creep, and Vibration Compensation for Piezoactuators: Feedback and Feedforward Control 1

Abstract We present an integrated two-step approach, which combines feedback and feedforward control, to compensate for the effects of hysteresis, creep, and vibration in piezoactuators. In this approach, the control of hysteresis and creep is decoupled from the control of vibrational dynamics. First, high-gain feedback control is used to minimize positioning error caused by hysteresis and creep. Second, an inversion-based feedforward approach, which can achieve exact tracking for general output trajectories, is used to compensate for error due to vibration at high scan rates. The feedforward approach is applicable to minimum (collocated sensor and actuator) and nonminimum phase (noncollocated sensor and actuator) positioning systems. The decoupling of hysteresis and creep control from vibration control simplifies the inversion-based approach, and the use of feedback provides robustness. We show significant improvement in positioning precision and scanning rate, and illustrate our results with an experimental piezoactuator scanner that is used in Atomic Force Microscope (AFM) applications.

[1]  Tadahiro Hasegawa,et al.  Modeling of shape memory alloy actuator and tracking control system with the model , 2001, IEEE Trans. Control. Syst. Technol..

[2]  R. Barrett,et al.  Optical scan‐correction system applied to atomic force microscopy , 1991 .

[3]  Santosh Devasia,et al.  High-speed solution switching using piezo-based micro-positioning stages , 2001, Proceedings of the 2001 American Control Conference. (Cat. No.01CH37148).

[4]  Ping Ge,et al.  Tracking control of a piezoceramic actuator , 1996, IEEE Trans. Control. Syst. Technol..

[5]  Santosh Devasia,et al.  Experimental and theoretical results in output-trajectory redesign for flexible structures , 1996, Proceedings of 35th IEEE Conference on Decision and Control.

[6]  H. Kaizuka,et al.  A Simple Way to Reduce Hysteresis and Creep When Using Piezoelectric Actuators , 1988 .

[7]  Calvin F. Quate,et al.  Scanning probes as a lithography tool for nanostructures , 1997 .

[8]  Kam K. Leang,et al.  Experimental and Theoretical Results in Output-Trajectory Redesign for Flexible Structures , 1998 .

[9]  A. J. Helmicki,et al.  An H/sub /spl infin// based controller for a gas turbine clearance control system , 1995, Proceedings of International Conference on Control Applications.

[10]  Santosh Devasia,et al.  Output Tracking for Actuator Deficient/Redundant Systems: Multiple Piezoactuator Example , 2000 .

[11]  Gene F. Franklin,et al.  Feedback Control of Dynamic Systems , 1986 .

[12]  Theo Fett,et al.  Determination of Room-temperature Tensile Creep of PZT , 1998 .

[13]  D. Croft,et al.  Creep, hysteresis, and vibration compensation for piezoactuators: atomic force microscopy application , 2000, Proceedings of the 2000 American Control Conference. ACC (IEEE Cat. No.00CH36334).

[14]  Hartmut Janocha,et al.  Compensation of hysteresis in solid-state actuators , 1995 .

[15]  Anthony G. Evans,et al.  Nonlinear Deformation of Ferroelectric Ceramics , 1993 .

[16]  Eduardo Bayo,et al.  A finite-element approach to control the end-point motion of a single-link flexible robot , 1987, J. Field Robotics.

[17]  Gerber,et al.  Atomic Force Microscope , 2020, Definitions.

[18]  Yuichi Okazaki,et al.  A micro-positioning tool post using a piezoelectric actuator for diamond turning machines , 1990 .

[19]  Vincent Hayward,et al.  Phase control approach to hysteresis reduction , 2001, IEEE Trans. Control. Syst. Technol..