F2-Lasers: High-Resolution Micromachining System for Shaping Photonic Components
暂无分享,去创建一个
Kevin P. Chen | Peter R. Herman | Gerd Marowsky | Jie Zhang | Jürgen Ihlemann | M. Wei | Dirk Schäfer | Peter Oestcrlin | Berthold Burghard
[1] Peter R. Herman,et al. Vacuum-ultraviolet holographic gratings etched by a single F 2 laser pulse , 1994 .
[2] Michael Stuke,et al. Direct fabrication of micro mesas by VUV laser ablation of polymers: PMMA (polymethylmethacrylate) , 1998 .
[3] Jie Zhang,et al. Advanced laser microfabrication of photonic components , 2000, International Symposium on Laser Precision Microfabrication.
[4] David Moore,et al. Processing applications with the 157-nm fluorine excimer laser , 1997, Photonics West.
[5] B. Wolff-Rottke,et al. Excimer laser ablation patterning of dielectric layers , 1995 .
[6] J. Sidhu,et al. Direct-etching studies of polymer films using a 157-nm F 2 laser , 1986 .
[7] Michael Stuke,et al. Rapid Prototype Fabrication of Smooth Microreactor Channel Systems in PMMA by VUV Laser Ablation at 157 NM for Applications in Genome Analysis and Biotechnology , 1998 .
[8] Robin S. Marjoribanks,et al. Laser shaping of photonic materials: deep-ultraviolet and ultrafast lasers , 2000 .