PROGRAMABLE SYSTEM FOR LOW FREQUENCY NOISE MEASUREMENTS IN MICROELECTRONICS DEVICES CONTACTED BY POINT PROBES

A novel system for low frequency noise, LFN, wafer-level (point probe) measurements and a method of the system calibration with the thermal noise of resistances are discussed. We also present some LFN data on MOSFETs as an example of implementing the LFN measurement technique for the device quality diagnostics.

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