Quartz structures for Coriolis Vibrating Gyroscopes

This paper reports a status on performances of the VIG Coriolis Vibrating Gyro developed at ONERA, and compares physical limits of this vibrating structure with promising new geometries for the next generation of sensors. Recent researches focused on a new quartz vibrating structure, nominally free from mechanical coupling between modes. First samples have been realized and characterized. As expected, the true separation between drive and sense electrode systems guarantees very little capacitive coupling, in the order of a few femto-Farads, smaller than in the VIG. Mechanical (quadrature) coupling has also been measured significantly smaller, and is now as low as 30°/s, while scale factor and quality factor of the cell have been preserved.