Impact of carbon coimplantation on boron behavior in silicon: Carbon–boron coclustering and suppression of boron diffusion
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A. Nishida | T. Tsunomura | T. Mogami | T. Toyama | H. Uchida | Y. Shimizu | Y. Nagai | N. Okada | F. Yano | H. Takamizawa | K. Inoue | M. Kato