A study of directional MEMS dual-fences gauge

In this paper, MEMS surface fence gauges are developed to measure simultaneously the magnitude and direction of wall shear stress in wind tunnel under two-dimensional turbulent boundary layers. The dual-fences are packaged together orthogonal to each other. In order to avoid the mutual influence caused by the flow field disturbance, the optimization analysis of the relative location of the two fences is carried out, and the simulation results indicate that the coupling influence between dual-fences was basically eliminated while the separation distance of two fences is four times its own length. Comparison experiments are made to verify the correctness of the flow simulation results, and the directional sensitivities of dual MEMS surface fence are calibrated, which indicated that MEMS dual-fences are equipped to distinguish direction of wall shear stress.

[1]  K. Breuer,et al.  Micromachined sensors for static and dynamic shear-stress measurements in aerodynamic flows , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[2]  Wolfgang Schröder,et al.  The Micro-Pillar Shear-Stress Sensor MPS3 for Turbulent Flow , 2009, Sensors.

[3]  V. C. Patel Calibration of the Preston tube and limitations on its use in pressure gradients , 1965, Journal of Fluid Mechanics.

[4]  W. Schröder,et al.  Feasability study of wall shear stress imaging using microstructured surfaces with flexible micropillars , 2005 .

[5]  W. Yuan,et al.  Flexible thermal sensor array on PI film substrate for underwater applications , 2010, 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS).

[6]  Ernst Obermeier,et al.  Calibration and use of a MEMS surface fence for wall shear stress measurements in turbulent flows , 2012 .

[7]  Ernst Obermeier,et al.  A MEMS skin-friction sensor for time resolved measurements in separated flows , 2004 .

[8]  Wolfgang Schröder,et al.  Measurement of turbulent wall shear-stress using micro-pillars , 2013 .

[9]  H. Higuchi A miniature, directional surface-fence gage , 1985 .

[10]  A. Neumann,et al.  Aeromems Wall Hot-Wire Sensor Arrays on Polyimide with Through Foil Vias and Bottom Side Electrical Contacts , 2007, TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.

[11]  Lennart Löfdahl,et al.  Pulsed hot-wire measurements in two- and three-dimensional wall jets , 1999 .

[12]  Ebenezer P. Gnanamanickam,et al.  Manufacture of high aspect ratio micro-pillar wall shear stress sensor arrays , 2012 .

[13]  Julio Soria,et al.  A film-based wall shear stress sensor for wall-bounded turbulent flows , 2011 .

[14]  H. Higuchi A miniature, directional surface-fence gage for three-dimensional turbulent boundary layer measurements , 1983 .

[15]  Measurements of skin friction in water using surface stress sensitive films , 2008 .

[16]  Vladimir S Fonov,et al.  The development of optical techniques for the measurement of pressure and skin friction , 2006 .