Experimentally validated 3D MD model for AFM-based tip-based nanomanufacturing

Promyoo, Rapeepan Ph.D., Purdue University, December 2016. Experimentally Validated 3D MD Model for AFM-Based Tip-Based Nanomanufacturing. Major Professors: Hazim El-Mounayri and Yung Shin, School of Mechanical Engineering. In order to control AFM-based TBN to produce precise nano-geometry efficiently, there is a need to conduct a more focused study of the effects of different parameters, such as feed, speed, and depth of cut on the process performance and outcome. This is achieved by experimentally validating a MD simulation model of nanomachining, and using it to conduct parametric studies to guide AFM-based TBN. A 3D MD model with a larger domain size was developed and used to gain a unique insight into the nanoindentation and nanoscratching processes such as the effect of tip speed (e.g. effect of tip speed on indentation force above 10 nm of indentation depth). The model also supported a more comprehensive parametric study (than other published work) in terms of number of parameters and ranges of values investigated, as well as a more cost effective design of experiments. The model was also used to predict material properties at the nanoscale (e.g. hardness of gold predicted within 6% error). On the other hand, a comprehensive experimental parametric study was conducted to produce a database that is used to select proper machining conditions for guiding the fabrication of nanochannels (e.g. scratch rate = 0.996 Hz, trigger threshold = 1 V, for achieving a nanochannel depth = 50 nm for the case of gold device). Similar trends for the variation of indentation force with depth of cut, pattern of the material pile-up around the indentation mark or scratched groove were found. The parametric studies conducted using both MD model simulations and AFM experiments showed the following: Normal forces for both nanoindentation and nanoscratching increase as the depth of cut increases. The indentation depth increases with tip speed, but the depth of scratch decrease with increasing tip speed. The width and depth of

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