Fabrication of 3-dimensionally shaped Si diaphragm dynamic focusing mirror
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[1] H. Fujita,et al. An Integrated Micro Servosystem , 2002, IEEE International Workshop on Intelligent Robots.
[2] T. Mitsuyu,et al. Reflection micro-Fresnel lenses and their use in an integrated focus sensor. , 1989, Applied Optics.
[3] D. Ehrlich,et al. Laser deposition and etching of three-dimensional microstructures , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.
[4] W. Menz,et al. The LIGA technique-A novel concept for microstructures and the combination with Si-technologies by injection molding , 1991, [1991] Proceedings. IEEE Micro Electro Mechanical Systems.
[5] Renshi Sawada,et al. Fabrication of active integrated optical micro-encoder , 1991, [1991] Proceedings. IEEE Micro Electro Mechanical Systems.
[6] C. C. Davis,et al. Fabrication of micro-structures using non-planar lithography (NPL) , 1991, [1991] Proceedings. IEEE Micro Electro Mechanical Systems.