존슨-라벡 타입 정전척의 물리적 모델링 및 특성 파악

Generally, Johnsen-Rahbek(J-R) type electrostatic chuck(ESC) generates higher attractive force than Coulomb type ESC. The attractive force in J-R type ESC is caused by the high electrical resistance which occurs in contact region between semiconductor wafer and dielectric layer. This research tries the simple geometrical modeling of contact surface and simulates contact resistance, attractive force and response time according to the variation of contact surface shape. In the latter half of this research, the simulation for pin chuck is accomplished using similar surface modeling and the comparison between pin chuck and general flat chuck is made in aspects of the attractive force and the response time.