论文信息 - Parametric Study of NiFe and NiFeCo High Density Plasma Etching Using CO / NH 3 - 字舞流文

Parametric Study of NiFe and NiFeCo High Density Plasma Etching Using CO / NH 3

J. Childress | D. Johnson | S. Onishi | K. B. Jung | H. Cho | Jan-Chen Hong | Y. Park | S. J. Peartona