论文信息 - Nanoparticle size and shape evaluation using the TSOM method

Nanoparticle size and shape evaluation using the TSOM method

A novel through-focus scanning optical microscopy (TSOM) method that yields nanoscale information from optical images obtained at multiple focal planes will be used here for nanoparticle dimensional analysis. The TSOM method can distinguish not only size differences but also shape differences among nanoparticles. Size evaluation based on simulations will be presented along with experimental data for nanoparticles and nanodots with sizes below 100 nm. Size determination using an experimentally created library will also be presented.

András E. Vladár | Ravikiran Attota | Bradley Damazo | Purushotham Kavuri

[1] Richard M. Silver,et al. Nanoscale Measurements with a Through-Focus Scanning-Optical-Microscope | NIST , 2009 .

[2] Richard M. Silver,et al. Nanometrology using a through-focus scanning optical microscopy method , 2011 .

[3] Tilo Pfeifer,et al. Optical Methods for Dimensional Metrology in Production Engineering , 2002 .

[4] Bryan M. Barnes,et al. Optical through-focus technique that differentiates small changes in line width, line height, and sidewall angle for CD, overlay, and defect metrology applications , 2008, SPIE Advanced Lithography.

[5] Richard M. Silver,et al. Optical illumination and critical dimension analysis using the through-focus focus metric method , 2006, SPIE Optics + Photonics.

[6] Ravikiran Attota,et al. Through-focus scanning-optical-microscope imaging method for nanoscale dimensional analysis. , 2008, Optics letters.

[7] Erik Novak,et al. TSOM method for semiconductor metrology , 2011, Advanced Lithography.

[8] Ravikiran Attota. Nanoscale Measurements With the TSOM Optical Method , 2010 .

[9] Thomas V. Pistor,et al. Electromagnetic Simulation and Modeling With Applications In Lithography , 2001 .