论文信息 - Spectroscopic ellipsometry of SU‐8 photoresist from 190 to 1680 nm (0.740–6.50 eV) - 字舞流文

Spectroscopic ellipsometry of SU‐8 photoresist from 190 to 1680 nm (0.740–6.50 eV)

Cody V. Cushman | M. Linford | Shiladitya Chatterjee | George H. Major | D. Ess | Joshua I. Wheeler | Sean C. Chapman | J. Chapman