Surface Loss Probability of Nitrogen Atom on Stainless-Steel in N2 Plasma Afterglow

We investigated the loss kinetics of nitrogen (N) atoms in a N2 plasma afterglow using a vacuum ultraviolet absorption spectroscopy technique with an atmospheric-pressure microdischarge hollow cathode lamp. The decay curves of N atom density were fitted with single exponential functions at pressures from 1.33 to 13.3 Pa. The dependence of the decay time constant on the pressure showed that the N atoms were predominantly lost through diffusion to the wall surface. The surface loss probability of N atoms on stainless-steel based on the decay time constant as a function of pressure was estimated to be 0.03.

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