论文信息 - Room temperature plasma-etching and surface passivation of far-ultraviolet Al mirrors using electron beam generated plasmas - 字舞流文

Room temperature plasma-etching and surface passivation of far-ultraviolet Al mirrors using electron beam generated plasmas

Edward J. Wollack | J. G. Richardson | V. Wheeler | A. Kozen | S. Walton | S. G. Rosenberg | M. Quijada | J. D. Hoyo | L. R. Marcos | D. Boris | J. Woodward | E. Gray