Single-shot selective laser micromachining of filtered arc deposited TiN films from chromium underlayer
暂无分享,去创建一个
Andrew J. Dowling | Muralidhar K. Ghantasala | Peter E. Evans | Jason P. Hayes | Erol C. Harvey | E. Derry Doyle | E. Harvey | J. Hayes | M. Ghantasala | A. J. Dowling | E. Doyle | P. Evans
[1] William Tarn,et al. CRC Handbook of Metal Etchants , 1990 .
[2] S. Lau,et al. Influence of deposition temperature on the structure and internal stress of TiN films deposited by filtered cathodic vacuum arc , 2002 .
[3] M. Rennau,et al. TiN diffusion barriers for copper metalization , 1998, European Workshop Materials for Advanced Metallization,.
[4] Steven Verhaverbeke,et al. A Model for the Etching of Ti and Tin in SC-1 Solutions , 1997 .
[5] Erol C. Harvey,et al. Excimer laser micromachining of TiN films from chromium and copper sacrificial layers , 2002 .
[6] Lawrence R. Doolittle,et al. Algorithms for the rapid simulation of Rutherford backscattering spectra , 1985 .
[7] Yu-Chong Tai,et al. Surface micromachined mechanisms and micromotors , 1991 .
[8] Ingrid De Wolf,et al. Fabrication and reliability testing of Ti/TiN heaters , 1999, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.
[9] P. Martin. Review of the filtered vacuum arc process and materials deposition , 2001 .
[10] H. Bender,et al. Comparison between wet HF etching and vapor HF etching for sacrificial oxide removal , 2000 .
[11] R. D. Greenough,et al. Metal film removal and patterning using a XeCl laser , 1983 .