论文信息 - Roughening of porous SiCOH materials in fluorocarbon plasmas - 字舞流文

Roughening of porous SiCOH materials in fluorocarbon plasmas

C. Cardinaud | N. Possémé | T. Chevolleau | M. Darnon | O. Joubert | T. David | R. Bouyssou | J. Ducoté | F. Bailly