Design, optimization and simulation on microelectromagnetic pump

A four-layer electromagnetic micropump was designed, and its static and dynamic characters were studied from elements to full system. The mechanical model of the electromagnetic actuator was established, and some its geometric structural parameters were then optimized. The deflection of the pump membrane caused by the varying local magnetic driving forces was analyzed in particular by ANSYS FEM. Fluid theory and experiment data were used to analyze the microvalve. Full system model of the micropump and its differential equations were set up on the basis of physical liquid transmission procedure and system function block. Pulse and periodic pulse driving current responses were evaluated. The flow-frequency characteristic shows that the most effective driving frequency is 125 Hz. The effect of driving signal duty cycle and microvalve flow resistance was studied. The transfer function of this full system of micropump was also discussed.