论文信息 - Thermal stability of a-SiNx:H films deposited by plasma electron cyclotron resonance - 字舞流文

Thermal stability of a-SiNx:H films deposited by plasma electron cyclotron resonance

I. Mártil | G. González-Díaz | Á. D. Prado | F. López | D. Bravo | F. L. Martı́nez | F. L. Martínez | Á. Prado