论文信息 - Design and operating characteristics of a metalorganic vapor phase epitaxy production scale, vertical, high speed, rotating disk reactor - 字舞流文

Design and operating characteristics of a metalorganic vapor phase epitaxy production scale, vertical, high speed, rotating disk reactor

W. Breiland | J. Hennessy | G. Tompa | A. Thompson | G. Evans | P. Zawadzki | P. Esherick | M. Mckee | K. Moy | C. Moore | E. Wolak | Alexander I. Gurary | N. J. Bulitka