Optimization of Comb-Driven Devices for Mechanical Testing of Polymeric Nanofibers Subjected to Large Deformations

Comb-driven electrostatic actuators applied to mechanical testing of nanostructures are usually designed by a ldquobrute-forcerdquo approach for maximum electrostatic-force output, which results in limited actuation range. This issue is more prevalent when testing soft nanofibers with large ductility. In this paper, the design considerations for a comb-driven platform for nanoscale mechanical testing of ductile nanofibers subjected to 50%, or larger, inelastic extensions are presented. The optimization carried out aimed at increasing the net-force output by comb drives with clamped-clamped tethers, which also improves on the accuracy in the calculation of the force that is applied onto the nanofiber specimens. At large actuator motions, tethers of low bending stiffness increased the net force applied to a nanofiber and provided better accuracy in the calculation of the applied force. On the contrary, at small actuator motions, the maximum net-force output by the comb drives increased with the axial tether stiffness due to the associated increase in the pull-in-instability voltage. The fabricated surface-micromachined devices enabled experiments with individual electrospun polyacrylonitrile nanofibers at a maximum force of 30 muN and extensions up to 60%. The force output calculated from the voltage input to the electrostatic devices was compared to direct measurements by an independent optical method. [2008-0252]

[1]  Michael M. Tilleman Analysis of electrostatic comb-driven actuators in linear and nonlinear regions , 2004 .

[2]  Horacio Dante Espinosa,et al.  A microelectromechanical load sensor for in situ electron and x-ray microscopy tensile testing of nanostructures , 2005 .

[3]  Rodney S. Ruoff,et al.  Analysis of a microelectromechanical system testing stage for tensile loading of nanostructures , 2006 .

[4]  Hiroyuki Fujita,et al.  Scratch drive actuator with mechanical links for self-assembly of three-dimensional MEMS , 1997 .

[5]  T. Kenny,et al.  Design of large deflection electrostatic actuators , 2003 .

[6]  Michael Curt Elwenspoek,et al.  Comb-drive actuators for large displacements , 1996 .

[7]  R. Mullen,et al.  Electrostatically actuated failure of microfabricated polysilicon fracture mechanics specimens† , 1999, Proceedings of the Royal Society of London. Series A: Mathematical, Physical and Engineering Sciences.

[8]  H. Kahn,et al.  A new technique for producing large-area as-deposited zero-stress LPCVD polysilicon films: the MultiPoly process , 2000, Journal of Microelectromechanical Systems.

[9]  T. Mackin,et al.  A traceable calibration procedure for MEMS-based load cells , 2008 .

[10]  Chengkuo Lee,et al.  Design and modeling for comb drive actuator with enlarged static displacement , 2004 .

[11]  R. Maboudian,et al.  High-performance surface-micromachined inchworm actuator , 2003, Journal of Microelectromechanical Systems.

[12]  Michael Hietschold,et al.  Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS) , 1998 .

[13]  William C. Tang,et al.  Electrostatic Comb Drive Levitation And Control Method , 1992 .

[14]  F. Rudolf,et al.  Novel polysilicon comb actuators for xy-stages , 1992, [1992] Proceedings IEEE Micro Electro Mechanical Systems.

[15]  S. Sugiyama,et al.  Mechanical and electrical properties evaluation of carbon nanowire using electrostatic actuated nano tensile testing devices (EANAT) , 2005, 5th IEEE Conference on Nanotechnology, 2005..

[16]  Eyal Zussman,et al.  Mechanical and structural characterization of electrospun PAN-derived carbon nanofibers , 2005 .

[17]  H. Kahn,et al.  Nano measurements with micro-devices: mechanical properties of hydrated collagen fibrils , 2006, Journal of The Royal Society Interface.

[18]  Y-S Liao,et al.  Numerical studies of variations in the gap and finger width ratio and travelled distance for the driving force of a radio-frequency microelectromechanical system device using the dual boundary element method , 2004 .

[19]  M. Kotaki,et al.  A review on polymer nanofibers by electrospinning and their applications in nanocomposites , 2003 .

[20]  M. A. Haque,et al.  Microscale materials testing using MEMS actuators , 2001 .

[21]  H. Kahn,et al.  Mechanical deformation and failure of electrospun polyacrylonitrile nanofibers as a function of strain rate , 2007 .

[22]  Seeram Ramakrishna,et al.  Preparation and characterization of nanofibrous filtering media , 2006 .

[23]  H. Espinosa,et al.  Institute of Physics Publishing Journal of Micromechanics and Microengineering a Thermal Actuator for Nanoscale in Situ Microscopy Testing: Design and Characterization , 2022 .

[24]  Christian Joachim,et al.  Drawing a single nanofibre over hundreds of microns , 1998 .

[25]  Haihui Ye,et al.  Electrospinning of Continuous Carbon Nanotube‐Filled Nanofiber Yarns , 2003 .

[26]  Charles R. Martin,et al.  Sol−Gel Template Synthesis of Semiconductor Oxide Micro- and Nanostructures , 1997 .

[27]  Neville K. S. Lee,et al.  Analysis and design of polysilicon thermal flexure actuator , 1999 .

[28]  Xiaoqin Yang,et al.  Hydrothermal synthesis of titanate nanowire arrays , 2007 .

[29]  Cuénot,et al.  Elastic modulus of polypyrrole nanotubes , 2000, Physical review letters.

[30]  I. Chasiotis Mechanics of thin films and microdevices , 2004, IEEE Transactions on Device and Materials Reliability.

[31]  H. Kahn,et al.  Novel method for mechanical characterization of polymeric nanofibers. , 2007, The Review of scientific instruments.