X Y Scanning Mechanism: A Dynamic Approach

Flexure mechanisms have immense scope in their use for applications involving high precision motion. There are many concepts to build high speed or high precision manipulators, but only a few of them can serve to obtain high speed together with high precision. Mathematical modeling of simple XY manipulator is carried out XY manipulator uses typical Double Flexural configurations. Static and dynamic analysis is carried out using MATLAB. Static analysis is carried out to determine static deflection of motion stage with force. It is observed that force deflection curve is linear. Dynamic analysis is carried out to determine frequencies and mode shapes of flexural manipulator. Further, Finite Element software ANSYS is used to carry out static and dynamic analysis of basic DFM configuration and few XY mechanisms. It is observed that close matching of FEM results with model developed. Keywords: Flexural Mechanism, Dynamic Modeling, ANSYS, Double Flexural Manipulator