Development of thin glass-based biconvex microlens fabrication technique via thermal expansion

We report a simple and efficient glass microlens fabrication technique by thermally inflating the microcavities on the thin glass slide. Due to the joint effect of high-temperature and vacuum pressure, the microcavities are gradually formed into hollow, transparent, and biconvex microlens. Based on this method, we fabricated a wide range of biconvex glass microlens that diameters from 30 µm to 1 mm on the thickness of 100 µm glass slide at the single and arrays of distributions. We evaluated the microlens morphologies, optical imaging quality, and magnification power.

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