Reliability of RF MEMS switches due to charging effects and their circuital modelling

The reliability of RF MEMS switches is typically reduced by charging effects occurring in the dielectrics. The aim of this paper is to discuss these effects, and to propose analytical and equivalent circuit models which account for most of the physical contributions present in the structure.

[1]  Gabriel M. Rebeiz.  RF MEMS: Theory, Design and Technology , 2003 .

[2]  P. Blondy,et al.  Model for MEMS Switches Power Handling and Phase Noise , 2002, 2002 32nd European Microwave Conference.

[3]  David Dubuc,et al.  Failure predictive model of capacitive RF-MEMS , 2005, Microelectron. Reliab..

[4]  Jun Shen,et al.  Micropumps based on alternating high-gradient magnetic fields , 2000 .

[5]  B. Pillans,et al.  Lifetime characterization of capacitive RF MEMS switches , 2001, 2001 IEEE MTT-S International Microwave Sympsoium Digest (Cat. No.01CH37157).

[6]  C. Goldsmith,et al.  Acceleration of Dielectric Charging in RF MEMS Capacitive Switches , 2006, IEEE Transactions on Device and Materials Reliability.

[7]  Gabriel M. Rebeiz,et al.  Intermodulation distortion and power handling in RF MEMS switches, varactors, and tunable filters , 2003 .

[8]  Patrick Pons,et al.  Dielectric charging in radio frequency microelectromechanical system capacitive switches: A study of material properties and device performance , 2007 .

[9]  Guoan Wang,et al.  RF MEMS Switches with Novel Materials and Micromachining Techniques for SOC/SOP RF Front Ends , 2006 .

[10]  C. Goldsmith,et al.  Superposition Model for Dielectric Charging of RF MEMS Capacitive Switches Under Bipolar Control-Voltage Waveforms , 2007, IEEE Transactions on Microwave Theory and Techniques.

[11]  P. Soussan,et al.  Influence of the substrate on the lifetime of capacitive RF MEMS switches , 2008, 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems.

[12]  Robert Puers,et al.  A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches , 2004 .

[13]  George J. Papaioannou,et al.  RF MEMS sensitivity to electromagnetic radiation , 2005 .

[15]  Hee-Chul Lee,et al.  Piezoelectrically actuated RF MEMS DC contact switches with low voltage operation , 2005 .

[16]  Patrick Pons,et al.  Structure dependent charging process in RF MEMS capacitive switches , 2007, Microelectron. Reliab..

[17]  H.J. De Los Santos,et al.  RF MEMS for ubiquitous wireless connectivity. Part II. Application , 2004, IEEE Microwave Magazine.

[18]  Steven T. Patton,et al.  Effects of dielectric charging on fundamental forces and reliability in capacitive microelectromechanical systems radio frequency switch contacts , 2006 .

[19]  Andrew G. Glen,et al.  APPL , 2001 .

[20]  A. Lazaro,et al.  Study of intermodulation in RF MEMS variable capacitors , 2006, IEEE Transactions on Microwave Theory and Techniques.

[21]  C.L. Goldsmith,et al.  Initial observation and analysis of dielectric-charging effects on RF MEMS capacitive switches , 2004, 2004 IEEE MTT-S International Microwave Symposium Digest (IEEE Cat. No.04CH37535).

[22]  Androula G. Nassiopoulou,et al.  The Second Conference on Microelectronics, Microsystems and Nanotechnology , 2005 .

[23]  D. Peroulis,et al.  RF MEMS switches with enhanced power-handling capabilities , 2004, IEEE Transactions on Microwave Theory and Techniques.

[24]  Gudrun Fischer,et al.  RF MEMS for Ubiquitous Wireless Connectivity: Part 2--Application-Part Two covers the utilization of , 2004 .