Monolithic high-contrast gratings as highly reflective mirrors: optimization and fabrication

High contrast gratings (HCGs) are an attractive alternative to distributed Bragg reflectors (DBRs) as highly reflective mirrors for VCSELs. In our previous work we proposed the use of monolithic HCGs (MHCGs) to reduce the vertical thickness and simplify the epitaxial structure of VCSELs. In this work we discuss the optimization and fabrication of MHCGs. We also analyze the impact of processing imperfections on the power reflectance of MHCGs.

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