论文信息 - High Thermal Conductivity of Submicrometer Aluminum Nitride Thin Films Sputter-Deposited at Low Temperature. - 字舞流文

High Thermal Conductivity of Submicrometer Aluminum Nitride Thin Films Sputter-Deposited at Low Temperature.

M. Asheghi | K. Goodson | A. Kummel | A. Talin | S. Ueda | Michelle E. Chen | Christopher Perez | Aaron J. Mcleod | E. Pop | Su-In Yi | Sam Vaziri | Ryan Hood | Xinyu Bao | Woosung Park | Suhas Kumar