Freestanding SiGe/Si/Cr and SiGe/Si/SixNy/Cr microtubes
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D. Grützmacher | Li Zhang | S. V. Golod | F. Glaus | C. David | D. Grützmacher | S. Golod | V. Prinz | P. Wägli | O. Kirfel | V. Ya. Prinz | Christophe David | P. Wägli | E. Deckhardt | Li Zhang | F. Glaus | O. Kirfel | E. Deckhardt
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