Dense and smooth amorphous films of multicomponent FeCoNiCuVZrAl high-entropy alloy deposited by direct current magnetron sputtering

Abstract The multicomponent amorphous nitride films of FeCoNiCuVZrAl high-entropy alloy were deposited by direct current magnetron sputtering in the mixture atmosphere of Ar and N 2 . The systematical investigations demonstrate that the chemical composition, microstructure, and mechanical properties of the amorphous films intimately rely on the concentration of N 2 in the atmosphere mixture. When N 2 flow ratio increases from 0% to 50%, the thickness of the films decreases, whereas the roughness firstly decreases and then increases. At the N 2 flow ratio of 30%, a perfect dense and smooth amorphous nitride film could be achieved. While the hardness and Young’s modulus of the film reach the maximum values of 12 and 166 GPa, respectively.

[1]  T. Shun,et al.  Multi‐Principal‐Element Alloys with Improved Oxidation and Wear Resistance for Thermal Spray Coating , 2004 .

[2]  A. Inoue.  High strength bulk amorphous alloys with low critical cooling rates (overview) , 1995 .

[3]  Zhongyi Liu,et al.  Structure and properties of (AlCrMnMoNiZrB0.1)Nx coatings prepared by reactive DC sputtering , 2011 .

[4]  J. Thornton.  The microstructure of sputter-deposited coatings , 1986 .

[5]  J. Yeh,et al.  Deformation and annealing behaviors of high-entropy alloy Al0.5CoCrCuFeNi , 2009 .

[6]  Zhongyi Liu,et al.  Aging behavior of a CuCr2Fe2NiMn high-entropy alloy , 2012 .

[7]  J. Yeh,et al.  Structural and mechanical properties of multi-element (AlCrMoTaTiZr)Nx coatings by reactive magnetron sputtering , 2011 .

[8]  J. Kasl,et al.  Hard and superhard Zr–Ni–N nanocomposite films , 2001 .

[9]  K. Kim,et al.  Anti-oxidation properties of TiAlN film prepared by plasma-assisted chemical vapor deposition and roles of Al , 1997 .

[10]  J. Yeh,et al.  Effect of iron content on wear behavior of AlCoCrFexMo0.5Ni high-entropy alloys , 2010 .

[11]  T. Shun,et al.  Nanostructured High‐Entropy Alloys with Multiple Principal Elements: Novel Alloy Design Concepts and Outcomes , 2004 .

[12]  Fuh-Sheng Shieu,et al.  Structural and mechanical properties of multi-element (TiVCrZrHf)N coatings by reactive magnetron sputtering , 2011 .

[13]  T. Aizawa,et al.  Friction and wear properties of CrAlN and CrVN films deposited by cathodic arc ion plating method , 2003 .

[14]  R. Mason,et al.  Sputtering in a glow discharge ion source-pressure dependence: theory and experiment , 1994 .

[15]  Q. Jiang,et al.  Microstructure and tensile properties of FeMnNiCuCoSnx high entropy alloys , 2013 .

[16]  Jia She,et al.  Effect of rare earth Y addition on the microstructure and mechanical properties of high entropy AlCoCrCuNiTi alloys , 2010 .

[17]  Hugh O. Pierson,et al.  Handbook of Refractory Carbides and Nitrides: Properties, Characteristics, Processing and Applications , 1996 .

[18]  J. Yeh,et al.  Nitride films deposited from an equimolar Al–Cr–Mo–Si–Ti alloy target by reactive direct current magnetron sputtering , 2008 .

[19]  Motofumi Ohki,et al.  Proposal for ISO 14577 : Metallic materials : Instrumented Indentation Test for Hardness and Materials Parameters (Part 1) Test Method (3rd. Influence on Computed Young's Modulus by Different Indenter's Tip Profile and Material Property (小特集 微小部および微小部材の評価技術) , 2012 .

[20]  Shou-Yi Chang,et al.  (AlCrTaTiZr)N/(AlCrTaTiZr)N0.7 bilayer structure of high resistance to the interdiffusion of Cu and Si at 900 °C , 2011 .

[21]  Hui Zhang,et al.  Synthesis and characterization of FeCoNiCrCu high-entropy alloy coating by laser cladding , 2011 .

[22]  Ye Pan,et al.  Synthesis and Characterization of NiCoFeCrAl3 High Entropy Alloy Coating by Laser Cladding , 2010 .

[23]  Chun-Huei Tsau,et al.  Strong amorphization of high-entropy AlBCrSiTi nitride film , 2012 .

[24]  J. B. Zhu,et al.  Microstructure and the properties of FeCoCuNiSnx high entropy alloys , 2012 .

[25]  Jien-Wei Yeh,et al.  Diffusion barrier properties of AlMoNbSiTaTiVZr high-entropy alloy layer between copper and silicon , 2008 .

[26]  Yuan-Sheng Huang,et al.  Microstructure, hardness, resistivity and thermal stability of sputtered oxide films of AlCoCrCu0.5NiFe high-entropy alloy , 2007 .

[27]  Shou-Yi Chang,et al.  Preparation and characterization of AlCrTaTiZr multi-element nitride coatings , 2006 .

[28]  Jenq-Gong Duh,et al.  Structure and soft magnetic properties of Fe-Co-Ni-based multicomponent thin films , 2005 .

[29]  C. Liu,et al.  Phase stability in high entropy alloys: Formation of solid-solution phase or amorphous phase , 2011 .

[30]  Vijayakumar C. Venugopal,et al.  Origin and evolution of sculptured thin films , 2000 .

[31]  Akira Takeuchi,et al.  Classification of Bulk Metallic Glasses by Atomic Size Difference, Heat of Mixing and Period of Constituent Elements and Its Application to Characterization of the Main Alloying Element , 2005 .

[32]  B. Chapman,et al.  Glow Discharge Processes: Sputtering and Plasma Etching , 1980 .

[33]  Rui Vilar,et al.  Dry sliding wear behavior of laser clad TiVCrAlSi high entropy alloy coatings on Ti–6Al–4V substrate , 2012 .

[34]  Yong Zhang,et al.  Microstructure and compressive properties of multicomponent Alx(TiVCrMnFeCoNiCu)100−x high-entropy alloys , 2007 .

[35]  H. H. Andersen,et al.  Sputtering yield measurements , 1981 .

[36]  Jien-Wei Yeh,et al.  Nanostructured nitride films of multi-element high-entropy alloys by reactive DC sputtering , 2004 .

[37]  Y. Zhou,et al.  Solid solution alloys of AlCoCrFeNiTix with excellent room-temperature mechanical properties , 2007 .

[38]  J. Yeh,et al.  Microstructure and electrochemical properties of high entropy alloys—a comparison with type-304 stainless steel , 2005 .

[39]  M. Deng,et al.  Effects of substrate temperature on the structure and mechanical properties of (TiVCrZrHf)N coatings , 2011 .

[40]  P. Liaw,et al.  Refractory high-entropy alloys , 2010 .