论文信息 - Deposition Temperature Effect on the Structure and Optical Property of RF‐PACVD‐Derived Hydrogenated SiCNO Film - 字舞流文

Deposition Temperature Effect on the Structure and Optical Property of RF‐PACVD‐Derived Hydrogenated SiCNO Film

H. von Seggern | D. Probst | R. Riedel | A. Thissen | H. Seggern | E. Kroke | Xuehua Yan | M. Ahles | Y. Zhou | R. Hauser | X. Yan | D. Probst