32 × 32 silicon photonic MEMS switch with gap-adjustable directional couplers fabricated in commercial CMOS foundry
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Ming C. Wu | Tae Joon Seok | R. Muller | N. Quack | Sangyoon Han | Kyoungsik Yu | John Jacobs | Lane Ochikubo | Chang-Kyu Kim | J. Béguelin