Device for the production of semiconductors

Semiconductor manufacturing apparatus comprising: a calculation unit having at least one computer for processing semiconductor design information; a control unit for controlling the emission of electrons according to a processing result of the semiconductor design information; a writing unit for emitting electrons in accordance with instructions of the control unit; and at least one storage device, characterized in that the communication between the memory device, the calculation unit, the control unit and the writing unit over a storage area network (50), whereby the memory device can be controlled.