论文信息 - Large area deposition of 〈100〉-textured diamond films by a 60-kW microwave plasma CVD reactor - 字舞流文

Large area deposition of 〈100〉-textured diamond films by a 60-kW microwave plasma CVD reactor

T. Tachibana | Y. Yokota | K. Kobashi | T. Hirao | K. Oura | Y. Ando | A. Watanabe | Y. Nishibayashi