论文信息 - Effects of low substrate temperature and ion assisted deposition on composition, optical properties, and stress of ZnS thin films.

Effects of low substrate temperature and ion assisted deposition on composition, optical properties, and stress of ZnS thin films.

ZnS thin films were deposited with and without ion assisted deposition onto substrates held at temperatures ranging from -120 to 50 degrees C. Effects on chemical and crystalline composition, film microstructure, refractive index, stress, and waveguide losses were investigated. We observed that minimum stress and minimum losses occurred at the same deposition temperature (-50 degrees C) in ZnS films, which also corresponded to a quenching of crystallinity.

V. Mizrahi | U. Gibson | G. Stegeman | J. A. Ruffner | M. Himel

[1] Stegeman,et al. Microstructure of J-band-forming cyanine dye monolayer probed by means of second-harmonic generation. , 1989, Physical review. A, General physics.

[2] U. Gibson,et al. Stress modification and reduced waveguide losses in ZnS thin films. , 1988, Applied optics.

[3] G. Stegeman,et al. New probe of thin‐film microstructure , 1987 .

[4] U J Gibson,et al. Measurement of planar waveguide losses using a coherent fiber bundle. , 1986, Applied optics.

[5] Le Nguyen Binh,et al. Low-loss waveguiding in ion-assisted-deposited thin films , 1985 .

[6] A. G. Gusev,et al. Dependence of the properties of ZnS films on the rate of deposition , 1984 .

[7] P. Martin,et al. Modification of the optical and structural properties of dielectric ZrO2 films by ion‐assisted deposition , 1984 .

[8] H A Macleod,et al. Ion-beam-assisted deposition of thin films. , 1983, Applied optics.

[9] H. K. Pulker,et al. The origin of mechanical stress in vacuum-deposited MgF2 and ZnS films , 1979 .

[10] H. Pulker,et al. An investigation of the evaporation process of dielectric materials , 1969 .

[11] Anthony E. Ennos,et al. Stresses developed in optical film coatings. , 1966, Applied optics.