A hybrid life cycle inventory of nano-scale semiconductor manufacturing.

The manufacturing of modern semiconductor devices involves a complex set of nanoscale fabrication processes that are energy and resource intensive, and generate significant waste. It is important to understand and reduce the environmental impacts of semiconductor manufacturing because these devices are ubiquitous components in electronics. Furthermore, the fabrication processes used in the semiconductor industry are finding increasing application in other products, such as microelectromechanical systems (MEMS), flat panel displays, and photovoltaics. In this work we develop a library of typical gate-to-gate materials and energy requirements, as well as emissions associated with a complete set of fabrication process models used in manufacturing a modern microprocessor. In addition, we evaluate upstream energy requirements associated with chemicals and materials using both existing process life cycle assessment (LCA) databases and an economic input-output (EIO) model. The result is a comprehensive data set and methodology that may be used to estimate and improve the environmental performance of a broad range of electronics and other emerging applications that involve nano and micro fabrication.

[1]  I. Boustead,et al.  Energy and packaging , 1981 .

[2]  S. Raoux,et al.  Remote microwave plasma source for cleaning chemical vapor deposition chambers: Technology for reducing global warming gas emissions , 1999 .

[3]  Michael R. Overcash,et al.  Methodology for developing gate-to-gate Life cycle inventory information , 2000 .

[4]  K. Schischke,et al.  Life cycle inventory analysis and identification of environmentally significant aspects in semiconductor manufacturing , 2001, Proceedings of the 2001 IEEE International Symposium on Electronics and the Environment. 2001 IEEE ISEE (Cat. No.01CH37190).

[5]  F. Taiariol,et al.  Life cycle assessment of an integrated circuit product , 2001, Proceedings of the 2001 IEEE International Symposium on Electronics and the Environment. 2001 IEEE ISEE (Cat. No.01CH37190).

[6]  Jean-Philippe Laurent,et al.  Development of parametric material, energy, and emission inventories for wafer fabrication in the semiconductor industry. , 2003, Environmental science & technology.

[7]  Seungdo Kim,et al.  Energy in chemical manufacturing processes: gate-to-gate information for life cycle assessment , 2003 .

[8]  A. Plepys,et al.  The environmental impacts of electronics. Going beyond the walls of semiconductor fabs , 2004, IEEE International Symposium on Electronics and the Environment, 2004. Conference Record. 2004.

[9]  Konrad Hungerbühler,et al.  Production of fine and speciality chemicals: procedure for the estimation of LCIs , 2004 .

[10]  F. Shadman,et al.  Comparative analysis of the manufacturing and consumer use phases of two generations of semiconductors [microprocessors] , 2004, IEEE International Symposium on Electronics and the Environment, 2004. Conference Record. 2004.

[11]  D. Dornfeld,et al.  UC Berkeley Green Manufacturing and Sustainable Manufacturing Partnership Title Quantifying the Environmental Footprint of Semiconductor Equipment Using the Environmental Value Systems Analysis ( EnV-S ) Permalink , 2004 .

[12]  Eric Williams,et al.  Energy intensity of computer manufacturing: hybrid assessment combining process and economic input-output methods. , 2004, Environmental science & technology.

[13]  E. Williams,et al.  Residential computer usage patterns in Japan and associated life cycle energy use , 2005, Proceedings of the 2005 IEEE International Symposium on Electronics and the Environment, 2005..

[14]  R. Frischknecht ecoinvent Data v1.1 (2004): From heterogenous databases to unified and transparent LCI data , 2005 .

[15]  T. Gutowski,et al.  A Thermodynamic Characterization of Manufacturing Processes , 2007, Proceedings of the 2007 IEEE International Symposium on Electronics and the Environment.