A 1-V Operated MEMS Variable Optical Attenuator Using Piezoelectric PZT Thin-Film Actuators

A rotational Si mirror driven by PZT actuators has been investigated for variable optical attenuator (VOA) applications. The PZT actuators deploy 3.1-mum PZT layer. The developed PZT-driven microelectromechanical systems VOA comprising a large Si reflection mirror integrated with a dual core fiber collimator in 3-D light attenuation arrangement. The curve of the attenuation versus driving voltage shows rather uniform changing rate taking the advantage of the linear relation between the optical angle and the driving voltage. Dynamic range of 40-50 dB is achieved at 1 and 1.2 dc driving voltages, respectively.

[1]  Yong-Kweon Kim,et al.  MEMS variable optical attenuator using a translation motion of 45° tilted vertical mirror , 2005 .

[2]  Tae-Sun Lim,et al.  Electrostatic MEMS variable optical attenuator with rotating folded micromirror , 2004 .

[3]  Ryutaro Maeda,et al.  Fabrication of piezoelectric microcantilevers using LaNiO3 buffered Pb(Zr,Ti)O3 thin film , 2008 .

[4]  Young Yun Kim,et al.  Refractive variable optical attenuator fabricated by silicon deep reactive ion etching , 2004, IEEE Photonics Technology Letters.

[5]  T. Itoh,et al.  Micromachined piezoelectric force sensors based on PZT thin films , 1996, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[6]  J. Baborowski.  Microfabrication of Piezoelectric MEMS , 2004 .

[7]  Toshihiro Itoh,et al.  Low speed piezoelectric optical microscanner actuated by piezoelectric microcantilevers using LaNiO3 buffered Pb(Zr,Ti)O3 thin film , 2009 .

[8]  H. Nam,et al.  Piezoelectrically pushed rotational micromirrors using detached PZT actuators for wide-angle optical switch applications , 2008 .

[9]  Chengkuo Lee,et al.  MOEMS variable optical attenuators using rotary comb drive actuators , 2006, IEEE Photonics Technology Letters.

[10]  G. Su,et al.  An electro-magnetic micromachined actuator monolithically integrated with a vertical shutter for variable optical attenuation , 2008 .

[11]  PIEZOELECTRICALLY DRIVEN MICROTRANSDUCER MASS SENSORS , 2005 .

[12]  Jae-Hyoung Park,et al.  Development of shunt type ohmic RF MEMS switches actuated by piezoelectric cantilever , 2007 .

[13]  H. Fujita,et al.  A 5-V operated MEMS variable optical attenuator by SOI bulk micromachining , 2004, IEEE Journal of Selected Topics in Quantum Electronics.

[14]  R. Maeda,et al.  Application of sol-gel deposited thin PZT film for actuation of 1D and 2D scanners , 1998, Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.

[15]  D. Kunze,et al.  Large deflection micromechanical scanning mirrors for linear scans and pattern generation , 2000, IEEE Journal of Selected Topics in Quantum Electronics.

[16]  Chengkuo Lee,et al.  3-V driven pop-up micromirror for reflecting light toward out-of-plane direction for VOA applications , 2004, IEEE Photonics Technology Letters.

[17]  Ai Qun Liu,et al.  MEMS variable optical attenuator using low driving voltage for DWDM systems , 2002 .

[18]  Seiji Aoyagi,et al.  Arrayed ultrasonic microsensors with high directivity for in-air use using PZT thin film on silicon diaphragms ☆ , 2002 .

[19]  X.M. Zhang,et al.  Linear MEMS variable optical attenuator using reflective elliptical mirror , 2005, IEEE Photonics Technology Letters.

[20]  Chengkuo Lee.  A MEMS VOA Using Electrothermal Actuators , 2007, Journal of Lightwave Technology.

[21]  Jin-Chern Chiou,et al.  Variable optical attenuator using a thermal actuator array with dual shutters , 2004 .

[22]  C. R. Giles,et al.  A fiber connectorized MEMS variable optical attenuator , 1998, IEEE Photonics Technology Letters.

[23]  Ryutaro Maeda,et al.  A fatigue test method for Pb(Zr,Ti)O3 thin films by using MEMS-based self-sensitive piezoelectric microcantilevers , 2008 .

[24]  Ryutaro Maeda,et al.  Piezoelectric Microactuator Devices , 2004 .

[25]  Chengkuo Lee,et al.  Monolithic-integrated 8CH MEMS variable optical attenuators , 2005 .

[26]  J. Andrew Yeh,et al.  In-plane rotary comb-drive actuator for a variable optical attenuator , 2008 .

[27]  Peter Enoksson,et al.  Highly sensitive triaxial silicon accelerometer with integrated PZT thin film detectors , 2001 .

[28]  C. Chen,et al.  Retro-reflection type MOEMS VOA , 2004, IEEE Photonics Technology Letters.

[29]  Tsu-Jae King Liu,et al.  Technologies for Cofabricating MEMS and Electronics , 2008, Proceedings of the IEEE.

[30]  B. Saadany,et al.  A MEMS-based VOA with very low PDL , 2004, IEEE Photonics Technology Letters.

[31]  Ryutaro Maeda,et al.  Smart optical microscanner with piezoelectric resonator, sensor, and tuner using Pb(Zr,Ti)O3 thin film , 2007 .

[32]  Chengkuo Lee,et al.  MOEMS variable optical attenuator with improved dynamic characteristics based on robust design , 2006 .

[33]  Chengkuo Lee.  Variable optical attenuator using planar light attenuation scheme based on rotational and translational misalignment , 2006 .

[34]  N. D. de Rooij,et al.  A variable optical attenuator based on silicon micromechanics , 1999, IEEE Photonics Technology Letters.

[35]  Sang-Gook Kim,et al.  DESIGN CONSIDERATIONS FOR MEMS-SCALE PIEZOELECTRIC MECHANICAL VIBRATION ENERGY HARVESTERS , 2005 .

[36]  J. A. Walker,et al.  Dynamic spectral power equalization using micro-opto-mechanics , 1998, IEEE Photonics Technology Letters.

[37]  Huikai Xie,et al.  A thermal bimorph micromirror with large bi-directional and vertical actuation , 2005 .

[38]  Gary K. Fedder,et al.  A CMOS-MEMS mirror with curled-hinge comb drives , 2003 .

[39]  Xuming Zhang,et al.  Optical and mechanical models for a variable optical attenuator using a micromirror drawbridge , 2003 .

[40]  Ryutaro Maeda,et al.  Effect of multi-coating process on the orientation and microstructure of lead zirconate titanate (PZT) thin films derived by chemical solution deposition , 2005 .

[41]  Chengkuo Lee,et al.  Scratch Drive Actuator Driven Self-assembled Variable Optical Attenuator , 2004 .

[42]  Chengkuo Lee,et al.  Development of a piezoelectric self-excitation and self-detection mechanism in PZT microcantilevers for dynamic scanning force microscopy in liquid , 1997 .

[43]  Chengkuo Lee,et al.  Novel VOA using in-plane reflective micromirror and off-axis light attenuation , 2003, IEEE Commun. Mag..

[44]  A. Q. Liua,et al.  Polysilicon micromachined fiber-optical attenuator for DWDM applications , 2003 .

[45]  Hyo-Jin Nam,et al.  PZT actuated micromirror for fine-tracking mechanism of high-density optical data storage , 2001 .

[46]  Lu Dong,et al.  Fabrication and performance of MEMS-based piezoelectric power generator for vibration energy harvesting , 2006, Microelectron. J..

[47]  Hiroshi Toshiyoshi,et al.  PIEZOELECTRIC 2D-OPTICAL MICRO SCANNERS WITH PZT THICK FILMS , 2005 .

[48]  R. Maeda,et al.  Deflection of wafers and cantilevers with Pt/LNO/PZT/LNO/Pt/Ti/SiO2 multilayered structure , 2008 .