论文信息 - A study of electronic states in a-SiOx and a-SiNx thin films by infrared, auger electron and X-ray photoelectron spectroscopies - 字舞流文

A study of electronic states in a-SiOx and a-SiNx thin films by infrared, auger electron and X-ray photoelectron spectroscopies

C. Wong | G. Lucovsky | P. Richard | D. Tsu | J. Tyler | S. Chao | P. Pai | J. Keem | S. Lin | Y. Takagi