Special Issue: 15 Years of SU8 as MEMS Material

In 1997, the first paper using SU-8 as a material for microfabrication was published [1], demonstrating the interest of this negative photoresist for the near-UV structuration of thick layers and the manufacturing of high aspect-ratio components.[...]

[1]  Bradley J. Nelson,et al.  Inkjet Printing of High Aspect Ratio Superparamagnetic SU-8 Microstructures with Preferential Magnetic Directions , 2014, Micromachines.

[2]  Graça Maria Henriques Minas,et al.  Optimized SU-8 Processing for Low-Cost Microstructures Fabrication without Cleanroom Facilities , 2014, Micromachines.

[3]  Rodrigo Martinez-Duarte,et al.  SU-8 Photolithography as a Toolbox for Carbon MEMS , 2014, Micromachines.

[4]  Stephanus Büttgenbach,et al.  Implementation of Synchronous Micromotor in Developing Integrated Microfluidic Systems , 2014, Micromachines.

[5]  Grégoire Genolet,et al.  UV-LIGA: From Development to Commercialization , 2014, Micromachines.

[6]  Jane M. Shaw,et al.  Micromachining applications of a high resolution ultrathick photoresist , 1995 .

[7]  Jeong-Bong Lee,et al.  Innovative SU-8 Lithography Techniques and Their Applications , 2014, Micromachines.

[8]  Harutaka Mekaru,et al.  Performance of SU-8 Membrane Suitable for Deep X-Ray Grayscale Lithography , 2015, Micromachines.

[9]  Sujeet K. Sinha,et al.  SU-8 Composite Based "Lube-tape" for a Wide Range of Tribological Applications , 2014, Micromachines.

[10]  Marc Madou,et al.  Biomimetic Pieris rapae's Nanostructure and Its Use as a Simple Sucrose Sensor , 2014, Micromachines.

[11]  Peter Vettiger,et al.  High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS , 1998 .

[12]  Stefano Mischler,et al.  Novel SU-8/Ionic Liquid Composite for Tribological Coatings and MEMS , 2015, Micromachines.

[13]  Bruno Bêche,et al.  Transferable Integrated Optical SU8 Devices: From Micronic Waveguides to 1D-Nanostructures , 2015, Micromachines.

[14]  Philippe Renaud,et al.  SU-8 as a Material for Microfabricated Particle Physics Detectors , 2014, Micromachines.