Ultrasound cleaning baths fitting the full range from micromechanical components up to large machine parts, are regularly used in industry and in the lab. Despite the large number of applications, generally approved principles and objective criteria for parameter settings which allow an efficient operation are non-existent. The empirical selections of the running parameters often impede an optimization in terms of produce and reproducibility. One proposal for an objective description of the processes is the characterization of the sound field in the cleaning bath, which causes cavities, and subsequently, the cleaning process. Sound field measurements in the appropriate frequency range from 20kHz up to more then 1MHz incorporate a number of problems, such as large sensors disturbing the sound field, a lack of accuracy and the risk of being destroyed by cavitation bubbles. Measurement systems based on optical fiber tips and piezo-electrical hydrophones will be presented, which fulfil the accuracy requirements and withstand ultrasound fields with high power and cavitation. The spatial distribution of sound field parameters such as positive and negative peak pressure, amplitudes of fundamentals, harmonics and sub-harmonics as well as the energy density and spectral density in several frequency ranges are determined in experiments. Finally, the determined field parameters are related to the cavitation effects by means of photometric analysis of perforated aluminium foil. Perforations as well as intentions are analyzed and quantified from scanner images of the exposed foil samples using special image processing software. The experiments indicate clear differences in the structure of the sound fields and the spectral properties between the several types of cleaning baths, transducer arrangements and excitations.
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