Optimum contact conditions for miniaturized surface acoustic wave linear motor

This paper reports the successful operation of a 70 MHz driving surface acoustic wave (SAW) linear motor with a miniaturized stator transducer. This paper also deals with an investigation into an optimized slider design for the miniaturized SAW linear motor. The performance of three silicon type sliders, with different projection size, was compared. Output forces of the three sliders were measured with change of pre-load. It was found that the slider with smaller projection tended to produce greater output force.

[1]  Toshiro Higuchi,et al.  Miniaturization of surface acoustic wave linear motor , 1998, 1998 IEEE Ultrasonics Symposium. Proceedings (Cat. No. 98CH36102).

[2]  Surface Acoustic Wave Motor with a Silicon Slider , 1998 .

[3]  Toshiro Higuchi,et al.  Surface acoustic wave linear motor using silicon slider , 1998, Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.