论文信息 - Epitaxial growth of CoSi2 in a decanano contact opening on a (100) silicon substrate - 字舞流文

Epitaxial growth of CoSi2 in a decanano contact opening on a (100) silicon substrate

H. Sohn | Jin-Woong Kim | Soo‐Hyun Kim | Ho‐Jung Sun | Young Jin Lee | Joo-Wan Lee | N. Sung | J. Ku | U. Kim