AlScN thin film based surface acoustic wave devices with enhanced microfluidic performance
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U. Schmid | Y. Fu | Jikui Luo | W. Xuan | Jinkai Chen | P. Duan | P. Mayrhofer | A. Bittner | J. Luo | W. B. Wang | J. J. Chen | Xue-Yao Wang | P. Duan | Yong Qing Fu | Y. Q. Fu | J. K. Chen | X. Z. Wang | Y. Q. Fu | Pengfei Duan | Jikui Luo | J. J. Chen | Xuefeng Wang | U. Schmid