论文信息 - Selective Etching of SiGe on SiGe/Si Heterostructures - 字舞流文

Selective Etching of SiGe on SiGe/Si Heterostructures

S. S. Rhee | K. L. Wang | G. K. Chang | T. K. Carns

[1] S. S. Rhee,et al. Selective Etching of SiGe on SiGe / Si Heterostructures , 1991 .