Novel sophisticate stepping 2-DOF piezoelectric actuator

By taking a piezoelectric stack as actuator element to realize 2-DOF precision driving in linear and rotary actuators arranged on flexible processing structure,a new piezoelectric stepping style precision 2-DOF actuator was designed.The stability and precision of the system was ensured by using unique double symmetry structure of anchoring/loosing.The finite element analysis of 2-DOF actuator combining with lots of experiments research proved the basic functions of the 2-DOF actuator.The test results show rotary driving of 2-DOF actuator reaches 0.45 μrad in resolution,18 mm in travel,0.04 rad·s~(-1) in velocity and 0.2 N·m in torque;linear driving reaches 40 nm in resolution,20 mm in travel,19.2 mm·min~(-1) in velocity and 10 N in driving power approximately.