Lucky-electron model of channel hot-electron injection in MOSFET'S

The lucky-electron concept is successfully applied to the modeling of channel hot-electron injection in n-channel MOSFET's, although the result can be interpreted in terms of electron temperature as well. This results in a relatively simple expression that can quantitatively predict channel hot-electron injection current in MOSFET's. The model is compared with measurements on a series of n-channel MOSFET's and good agreement is achieved. In the process, new values for many physical parameters such as hot-electron scattering mean-free-path, impact-ionization energy are determined. Of perhaps even greater practical significance is the quantitative correlation between the gate current and the substrate current that this model suggests.

[1]  R. Van Overstraeten,et al.  Charge multiplication in silicon p-n junctions☆ , 1963 .

[2]  C. R. Crowell,et al.  Temperature dependence of avalanche multiplication in semiconductors , 1966 .

[3]  J. L. Moll,et al.  Temperature dependence of hot electron drift velocity in silicon at high electric field , 1968 .

[4]  R. V. Overstraeten,et al.  Measurement of the ionization rates in diffused silicon p-n junctions , 1970 .

[5]  J. F. Verwey,et al.  Mean free path of hot electrons at the surface of boron‐doped silicon , 1975 .

[6]  Donald R. Young Electron current injected into SiO2 from p‐type Si depletion regions , 1976 .

[7]  Tak H. Ning,et al.  Emission probability of hot electrons from silicon into silicon dioxide , 1977 .

[8]  R. R. Troutman Silicon surface emission of hot electrons , 1978 .

[9]  S. Asai,et al.  A numerical model of avalanche breakdown in MOSFET's , 1978, IEEE Transactions on Electron Devices.

[10]  Peter E. Cottrell,et al.  Hot-electron emission in N-channel IGFET's , 1979 .

[11]  Tak H. Ning,et al.  1 pm MOSFET VLSI Technology: Part lV— Hot-Electron Design Constraints , 1979 .

[12]  F.H. Gaensslen,et al.  Sensitive technique for measuring small MOS gate currents , 1980, IEEE Electron Device Letters.

[13]  T.N. Nguyen,et al.  Physical mechanisms responsible for short channel effects in MOS devices , 1981, 1981 International Electron Devices Meeting.

[14]  B. Eitan,et al.  Hot-electron injection into the oxide in n-channel MOS devices , 1981, IEEE Transactions on Electron Devices.

[15]  Chenming Hu,et al.  Correlation between substrate and gate currents in MOSFET's , 1982, IEEE Transactions on Electron Devices.

[16]  S.G. Chamberlain,et al.  Three-dimensional simulation of VLSI MOSFET's: The three-dimensional simulation program WATMOS , 1982, IEEE Transactions on Electron Devices.