论文信息 - Optical emission spectroscopy of reactive plasmas: A method for correlating emission intensities to reactive particle density

Optical emission spectroscopy of reactive plasmas: A method for correlating emission intensities to reactive particle density

The addition of a small concentration of suitably chosen noble gas to a reactive plasma is shown to permit the determination of the functional dependence of reactive particle density on plasma parameters. Examples illustrating the simplicity of this method are presented using F atomic emission from plasma‐etching discharges and a comparison is made to available data in the literature.

J. Coburn | J. W. Coburn | M. Chen | M. Chen

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