High-Q MEMS for wireless integrated circuits

While integration technology has steadily improved size and performance for wireless baseband circuitry, quality factor and frequency limitations still limit RF front-end circuitry to many large discrete components. Integration solutions for two such RF components are described. Silicon MEMS techniques are used to create self-assembled inductors with reduced losses and improved high frequency characteristics compared with conventional integrated inductors. The same technology is used to demonstrate variable inductors. Filter technology based on micromachined acoustic wave resonators is also presented, offering reduced size over conventional resonators as well as an integration path.

[1]  V. Lubecke,et al.  Integrated RF MEMS for Single Chip Radio , 2001 .

[2]  Y. Oshmyansky,et al.  PCS 1900 MHz duplexer using thin film bulk acoustic resonators (FBARs) , 1999 .

[3]  Paul J. McWhorter,et al.  Embedded micromechanical devices for the monolithic integration of MEMS with CMOS , 1995, Proceedings of International Electron Devices Meeting.

[4]  S. Montague,et al.  Embedded micromechanical devices for the monolithic integration of MEMS with CMOS , 1995, Proceedings of International Electron Devices Meeting.

[5]  D.J. Young,et al.  Monolithic high-performance three-dimensional coil inductors for wireless communication applications , 1997, International Electron Devices Meeting. IEDM Technical Digest.

[6]  P. Bradley,et al.  A film bulk acoustic resonator (FBAR) duplexer for USPCS handset applications , 2001, 2001 IEEE MTT-S International Microwave Sympsoium Digest (Cat. No.01CH37157).

[7]  Kenneth Meade Lakin,et al.  Solidly mounted resonators and filters , 1995, 1995 IEEE Ultrasonics Symposium. Proceedings. An International Symposium.

[8]  T. Tokumitsu,et al.  Monolithic microwave active inductors and their applications , 1991, 1991., IEEE International Sympoisum on Circuits and Systems.

[9]  Victor Manuel Lubecke,et al.  Design, test, and simulation of self-assembled micromachined rf inductors , 1999, Design, Test, Integration, and Packaging of MEMS/MOEMS.

[10]  David A. Koester,et al.  Modeling of stress-induced curvature in surface-micromachined devices , 1997, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

[11]  Chen-Yu Chi,et al.  Planar microwave and millimeter-wave lumped elements and coupled-line filters using micro-machining techniques , 1995 .

[12]  V. Lubecke,et al.  Self-assembling MEMS variable and fixed RF inductors , 2000, 2000 Asia-Pacific Microwave Conference. Proceedings (Cat. No.00TH8522).

[13]  Xi-Qing Sun,et al.  A monolithic variable inductor network using microrelays with combined thermal and electrostatic actuation , 1999 .