Microstructured silicon photodetector

Photodetectors fabricated on microstructured silicon are reported. The photodetectors exhibited high photoresponse; at 3V bias, the responsivities were 92A∕W at 850nm and 119A∕W at 960nm. At wavelengths longer than 1.1μm, the photodetectors still showed strong photoresponse. A generation-recombination gain mechanism has been proposed to explain the photoresponse of these photodiodes. From measurements of the noise current density, the calculated gain was approximately 1200 at 3V bias.

[1]  Joe C. Campbell,et al.  Noise and photoconductive gain in InAs quantum-dot infrared photodetectors , 2003 .

[2]  Tayfun Akin,et al.  A low-cost uncooled infrared microbolometer detector in standard CMOS technology , 2003 .

[3]  J.C. Campbell,et al.  High-speed monolithically integrated silicon optical receiver fabricated in 130-nm CMOS technology , 2002, IEEE Photonics Technology Letters.

[4]  V Chu,et al.  An on-chip thin film photodetector for the quantification of DNA probes and targets in microarrays. , 2004, Nucleic acids research.

[5]  Pierre Gibart,et al.  PHOTOCONDUCTOR GAIN MECHANISMS IN GAN ULTRAVIOLET DETECTORS , 1997 .

[6]  Mengyan Shen,et al.  Visible and near-infrared responsivity of femtosecond-laser microstructured silicon photodiodes. , 2005, Optics letters.

[7]  J. Pankove,et al.  Study of defect states in GaN films by photoconductivity measurement , 1995 .

[8]  P. Treado,et al.  Indium Antimonide (InSb) Focal Plane Array (FPA) Detection for Near-Infrared Imaging Microscopy , 1994 .

[9]  E. Mazur,et al.  Infrared absorption by conical silicon microstructures made in a variety of background gases using femtosecond-laser pulses , 2001, CLEO 2001.

[10]  Eric Mazur,et al.  Comparison of Structure and Properties of Femtosecond and Nanosecond Laser-Structured Silicon , 2004 .

[11]  Eric Mazur,et al.  Near-unity below-band-gap absorption by microstructured silicon , 2001 .

[12]  Mengyan Shen,et al.  Femtosecond Laser-Induced Formation Of Submicrometer Spikes On Silicon In Water , 2004 .