论文信息 - Correlating structural and mechanical properties of AlN/TiN superlattice films - 字舞流文

Correlating structural and mechanical properties of AlN/TiN superlattice films

Zaoli Zhang | M. Fallmann | M. Friák | M. Černý | D. Holec | M. Bartosik | P. Mayrhofer | P. Řehák | M. Šob | N. Koutná | Zhuo Chen