论文信息 - Effects of dielectric liners on TDDB lifetime of a Cu/ low-k interconnect - 字舞流文

Effects of dielectric liners on TDDB lifetime of a Cu/ low-k interconnect

J. McPherson | T. Tsui | R. Willecke | A. Mckerrow | P. Matz | E. Zielinski | G. Haase | Tae Kim | A. Singh